Novel post-etching treatment of small windows in oxide for selective epitaxial growth

JWH Maes, J Caro, CCG Visser, T Zijlstra, EWJM van der Drift, S Radelaar, FD Tichelaar, EJM Fakkeldij

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)973-975
Number of pages3
JournalApplied Physics Letters
Publication statusPublished - 1997

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