Novel thin film polymer foaming technique for low and ultralow-k dielectrics.

B Krause, GB Koops, NFA van der Vegt, M Wessling, J van Turnhout, M Wubbenhorst

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings 7th. Intern. Conf. on Solid Dielectrics.
Place of Publication	Piscataway
Publisher	IEEE
Pages	187-190
Number of pages	4
ISBN (Print)	0-7803-4238-0
Publication status	Published - 2001
Event	2001 IEEE 7th International Conference on Solid Dielectrics, Eindhoven, The Netherlands. - Piscataway Duration: 25 Jun 2001 → 29 Jun 2001

Name
Publisher	IEEE

Conference	2001 IEEE 7th International Conference on Solid Dielectrics, Eindhoven, The Netherlands.
Period	25/06/01 → 29/06/01

Keywords

@inproceedings{048c175e2a5e41719c005b184c0031ba,

title = "Novel thin film polymer foaming technique for low and ultralow-k dielectrics.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "B Krause and GB Koops and {van der Vegt}, NFA and M Wessling and {van Turnhout}, J and M Wubbenhorst",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-7803-4238-0",

publisher = "IEEE",

pages = "187--190",

booktitle = "Proceedings 7th. Intern. Conf. on Solid Dielectrics.",

address = "United States",

note = "2001 IEEE 7th International Conference on Solid Dielectrics, Eindhoven, The Netherlands. ; Conference date: 25-06-2001 Through 29-06-2001",

}

TY - GEN

T1 - Novel thin film polymer foaming technique for low and ultralow-k dielectrics.

AU - Krause, B

AU - Koops, GB

AU - van der Vegt, NFA

AU - Wessling, M

AU - van Turnhout, J

AU - Wubbenhorst, M

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-4238-0

SP - 187

EP - 190

BT - Proceedings 7th. Intern. Conf. on Solid Dielectrics.

PB - IEEE

CY - Piscataway

T2 - 2001 IEEE 7th International Conference on Solid Dielectrics, Eindhoven, The Netherlands.

Y2 - 25 June 2001 through 29 June 2001

ER -