Novel thin film polymer foaming technique for low and ultralow-k dielectrics.

B Krause, GB Koops, NFA van der Vegt, M Wessling, J van Turnhout, M Wubbenhorst

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    5 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationProceedings 7th. Intern. Conf. on Solid Dielectrics.
    Place of PublicationPiscataway
    PublisherIEEE Society
    Pages187-190
    Number of pages4
    ISBN (Print)0-7803-4238-0
    Publication statusPublished - 2001
    Event2001 IEEE 7th International Conference on Solid Dielectrics, Eindhoven, The Netherlands. - Piscataway
    Duration: 25 Jun 200129 Jun 2001

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference2001 IEEE 7th International Conference on Solid Dielectrics, Eindhoven, The Netherlands.
    Period25/06/0129/06/01

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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