Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition

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Original language	English
Pages (from-to)	28-31
Number of pages	4
Journal	Annual Journal of Electronics
Volume	8
Publication status	Published - 2014

Cite this

@article{8ac8335659004631a4445e479a60df77,

title = "Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition",

author = "V Mohammadi and Saeide Mohammadi and S Ramesh and S Nihtianov",

year = "2014",

language = "English",

volume = "8",

pages = "28--31",

journal = "Annual Journal of Electronics",

issn = "1313-1842",

}

TY - JOUR

T1 - Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition

AU - Mohammadi, V

AU - Mohammadi, Saeide

AU - Ramesh, S

AU - Nihtianov, S

PY - 2014

Y1 - 2014

UR - http://ecad.tu-sofia.bg/et/2014/ET2014/AJE_2014/028-V_Mohammadi.pdf

M3 - Article

SN - 1313-1842

VL - 8

SP - 28

EP - 31

JO - Annual Journal of Electronics

JF - Annual Journal of Electronics

ER -