Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition

V Mohammadi, Saeide Mohammadi, S Ramesh, S Nihtianov

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)28-31
Number of pages4
JournalAnnual Journal of Electronics
Volume8
Publication statusPublished - 2014

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