Original language | English |
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Pages (from-to) | 28-31 |
Number of pages | 4 |
Journal | Annual Journal of Electronics |
Volume | 8 |
Publication status | Published - 2014 |
Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition
V Mohammadi, Saeide Mohammadi, S Ramesh, S Nihtianov
Research output: Contribution to journal › Article › Scientific › peer-review