Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests

F Buja, J Kokorian, R Gulotty, AV Sumant, WM van Spengen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Article number125020
Number of pages15
JournalJournal of Micromechanics and Microengineering
Publication statusPublished - 2015

Cite this