Original language | English |
---|---|
Article number | 125020 |
Number of pages | 15 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 25 |
DOIs | |
Publication status | Published - 2015 |
Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests
F Buja, J Kokorian, R Gulotty, AV Sumant, WM van Spengen
Research output: Contribution to journal › Article › Scientific › peer-review
3
Citations
(Scopus)