Observations on the Optical Point Spread Function of a Lithographic Projection Lens

P. Dirksen, JJM Braat, P. de Bisschop, A Janssen, C. Juffermans, A. Williams

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Name

Name
Volume	4691

Keywords

@inproceedings{3d7625ca48014fc9bc542c0c3f23321c,

title = "Observations on the Optical Point Spread Function of a Lithographic Projection Lens",

keywords = "Conf.proc. > 3 pag",

author = "P. Dirksen and JJM Braat and {de Bisschop}, P. and A Janssen and C. Juffermans and A. Williams",

year = "2002",

language = "Undefined/Unknown",

pages = "7 p--7 p",

editor = "A. Yen and B.W. Smith",

booktitle = "Proceedings SPIE",

}