On-chip isolation in wafer-level chip-scale packages: substrate thinning and circuit partitioning by trenches

SM Sinaga, A Poliakov, M Bartek, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings 2003 international symposium on microelectronics
Editors	s.n.
Place of Publication	Washington
Publisher	IMAPS
Pages	768-773
Number of pages	6
ISBN (Print)	0-930815-71-8
Publication status	Published - 2003
Event	2003 international symposium on microelectronics, Boston - Washington Duration: 16 Nov 2003 → 20 Nov 2003

Name
Publisher	IMAPS

Conference	2003 international symposium on microelectronics, Boston
Period	16/11/03 → 20/11/03

Keywords

@inproceedings{d5f477a3d3b74adfa1987cf95899401d,

title = "On-chip isolation in wafer-level chip-scale packages: substrate thinning and circuit partitioning by trenches",

keywords = "Conf.proc. > 3 pag",

author = "SM Sinaga and A Poliakov and M Bartek and JN Burghartz",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-930815-71-8",

publisher = "IMAPS",

pages = "768--773",

editor = "s.n.",

booktitle = "Proceedings 2003 international symposium on microelectronics",

note = "null ; Conference date: 16-11-2003 Through 20-11-2003",

}

Proceedings 2003 international symposium on microelectronics. ed. / s.n. Washington : IMAPS, 2003. p. 768-773.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - On-chip isolation in wafer-level chip-scale packages: substrate thinning and circuit partitioning by trenches

AU - Sinaga, SM

AU - Poliakov, A

AU - Bartek, M

AU - Burghartz, JN

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-930815-71-8

SP - 768

EP - 773

BT - Proceedings 2003 international symposium on microelectronics

A2 - s.n., null

PB - IMAPS

CY - Washington

Y2 - 16 November 2003 through 20 November 2003

ER -