@inproceedings{42e2d37d9254489985a5c89c69dca2c8,
title = "On chip measurement for side-wall roughness in SOI waveguides by atomic force microscopy",
keywords = "conference contrib. non-refer., Geen BTA classificatie",
author = "CK Yang and {Margallo Balbas}, E and G Pandraud and PJ French",
note = "NEO; First mediterranean conference on photonics, Ischia, Italy ; Conference date: 25-06-2008 Through 28-06-2008",
year = "2008",
language = "Undefined/Unknown",
isbn = "88902065-1-9",
publisher = "mediterranean photonics",
pages = "48--50",
editor = "s.n.",
booktitle = "Proceedings of First Mediterranean Photonics Conference",
}