On chip measurement for side-wall roughness in SOI waveguides by atomic force microscopy

CK Yang, E Margallo Balbas, G Pandraud, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of First Mediterranean Photonics Conference
Editors s.n.
Place of Publicationischia,italy
Publishermediterranean photonics
Pages48-50
Number of pages3
ISBN (Print)88902065-1-9
Publication statusPublished - 2008
EventFirst mediterranean conference on photonics, Ischia, Italy - ischia,italy
Duration: 25 Jun 200828 Jun 2008

Publication series

Name
Publishermediterranean photonics

Conference

ConferenceFirst mediterranean conference on photonics, Ischia, Italy
Period25/06/0828/06/08

Keywords

  • conference contrib. non-refer.
  • Geen BTA classificatie

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