On-chip silicon Mach–Zehnder interferometer sensor for ultrasound detection

Boling Ouyang*, Yanlu Li, Marten Kruidhof, Roland Horsten, Koen W.A. van Dongen, Jacob Caro

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

27 Citations (Scopus)

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