@inproceedings{3a6b0ba253c14941b4f8f935f9316ebf,
title = "On detection of micro and submicron cantilevers",
keywords = "conference contrib. refereed, Geen BTA classificatie",
author = "CK Yang and {Babaei Gavan}, K and G Pandraud and AJ Katan and {van der Drift}, EWJM and PJ French",
note = "Editor onbekend JH; 16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), G{\"o}teborg, Sweden ; Conference date: 04-09-2005 Through 06-09-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "91-631-7553-3",
publisher = "s.n.",
pages = "316--319",
editor = "s.n.",
booktitle = "Proceedings of the 16th MME MicroMechanics Europe Workshop",
}