On integrated process development for SOI-MEMS inertial devices

V Rajaraman

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationNijmegen, The Netherlands
PublisherNXP Semiconductors
Number of pages41
Publication statusPublished - 2007

Publication series

Name
PublisherNXP semiconductors

Keywords

  • Elektrotechniek
  • Techniek
  • official reports
  • Geen BTA classificatie

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