On the effects of implantation temperature in helium implanted silicon

E Oliviero, ML David, MF Beaufort, JF Barbot, A van Veen

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{f09127d25345432abbdf910eae3acaf2,

title = "On the effects of implantation temperature in helium implanted silicon",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "E Oliviero and ML David and MF Beaufort and JF Barbot and {van Veen}, A",

year = "2002",

language = "Undefined/Unknown",

volume = "81",

pages = "4201--4203",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}