On the effects of implantation temperature in helium implanted silicon

E Oliviero, ML David, MF Beaufort, JF Barbot, A van Veen

    Research output: Contribution to journalArticleScientificpeer-review

    29 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)4201-4203
    Number of pages3
    JournalApplied Physics Letters
    Volume81
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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