On the improvement of heterodyne displacement interferometry: Enhancing measurement linearity and system modularity

AJH Meskers

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Munnig Schmidt, Robert, Supervisor
  • Spronck, J.W., Advisor
Award date7 Nov 2014
Print ISBNs978-94-6203-674-1
DOIs
Publication statusPublished - 2014

Keywords

  • Diss. prom. aan TU Delft

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