On the improvement of heterodyne displacement interferometry: Enhancing measurement linearity and system modularity

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Munnig Schmidt, Robert, Supervisor Spronck, J.W., Advisor
Award date	7 Nov 2014
Print ISBNs	978-94-6203-674-1
DOIs	https://doi.org/10.4233/uuid:f4cbaf4e-7240-40d0-a274-681e775e4700
Publication status	Published - 2014

Keywords

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title = "On the improvement of heterodyne displacement interferometry: Enhancing measurement linearity and system modularity",

keywords = "Diss. prom. aan TU Delft",

author = "AJH Meskers",

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language = "English",

isbn = "978-94-6203-674-1",

school = "Delft University of Technology",

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M3 - Dissertation (TU Delft)

SN - 978-94-6203-674-1

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