On the influence of the sputtering in determining the resolution of a Scanning Ion Microscope

V Castaldo, CW Hagen, P Kruit, E van Veldhoven, D Maas

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)3196-3202
    Number of pages7
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume27
    Issue number6
    Publication statusPublished - 2009

    Keywords

    • CWTS JFIS < 0.75

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