On the occurrence of non-symmetric flows in axisymmetric CVD reactors.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	CVDXV proceedings of the 15th International Conference on Chemical Vapor Deposition.
Editors	MD Allendorf, ML Hitchman
Publisher	The Electrochemical Society
Pages	160-167
Number of pages	8
ISBN (Print)	1-56677-278-8
Publication status	Published - 2000

Name
Publisher	The Electrochemical Society

Name
Volume	2000-13

Keywords

@inproceedings{dcf3382b9b6344cfa859444e51ce60f4,

title = "On the occurrence of non-symmetric flows in axisymmetric CVD reactors.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Santen}, H and CR Kleijn and {van den Akker}, HEA",

year = "2000",

language = "Undefined/Unknown",

isbn = "1-56677-278-8",

publisher = "The Electrochemical Society",

pages = "160--167",

editor = "MD Allendorf and ML Hitchman",

booktitle = "CVDXV proceedings of the 15th International Conference on Chemical Vapor Deposition.",

}

On the occurrence of non-symmetric flows in axisymmetric CVD reactors. / van Santen, H; Kleijn, CR ; van den Akker, HEA.
CVDXV proceedings of the 15th International Conference on Chemical Vapor Deposition.. ed. / MD Allendorf; ML Hitchman. The Electrochemical Society, 2000. p. 160-167.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - On the occurrence of non-symmetric flows in axisymmetric CVD reactors.

AU - van Santen, H

AU - Kleijn, CR

AU - van den Akker, HEA

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-56677-278-8

SP - 160

EP - 167

BT - CVDXV proceedings of the 15th International Conference on Chemical Vapor Deposition.

A2 - Allendorf, MD

A2 - Hitchman, ML

PB - The Electrochemical Society

ER -