On the origin of stress in magnetron sputtered TiN layers.

J-D Kamminga, Th.H de Keijser, R Delhez, EJ Mittemeijer

    Research output: Contribution to journalArticleScientificpeer-review

    76 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)6332-6345
    Number of pages14
    JournalJournal of Applied Physics
    Volume88
    Issue number11
    Publication statusPublished - 2000

    Bibliographical note

    ISSN 0021-8979

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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