On the size-dependent elasticity of silicon nanocantilevers: impact of defects

H Sadeghian Marnani, JFL Goosen, A Bossche, BJ Thijsse, A van Keulen

Research output: Contribution to journalArticleScientificpeer-review

48 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)0720011-0720016
Number of pages6
JournalJournal of Physics D: Applied Physics
Volume44
DOIs
Publication statusPublished - 2011

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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