One nanometer structure fabrication using electron beam induced deposition

WF van Dorp, CW Hagen, P. A. Crozier, B van Someren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    24 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1468-1470
    Number of pages3
    JournalMicroelectronic Engineering
    Issue number4-9
    Publication statusPublished - 2006


    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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