Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor

F jutzi, DHB Wicaksono, G Pandraud, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationOptical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor
Editors s.n.
Place of PublicationVeldhoven, The Netherlands
PublisherSAFE
Pages482-487
Number of pages6
ISBN (Print)978 90 73461 49 9
Publication statusPublished - 2007
EventSAFE 2007 - Veldhoven, The Netherlands.
Duration: 29 Nov 200730 Nov 2007

Publication series

Name
PublisherSAFE

Conference

ConferenceSAFE 2007
Period29/11/0730/11/07

Keywords

  • professional journal papers
  • Conf.proc. > 3 pag

Cite this