@inproceedings{450d3b3dbb9a49a6a11c0579b9c93d18,
title = "Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor",
keywords = "professional journal papers, Conf.proc. > 3 pag",
author = "F jutzi and DHB Wicaksono and G Pandraud and PJ French",
year = "2007",
language = "Undefined/Unknown",
isbn = "978 90 73461 49 9",
publisher = "SAFE",
pages = "482--487",
editor = "s.n.",
booktitle = "Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor",
note = "SAFE 2007 ; Conference date: 29-11-2007 Through 30-11-2007",
}