Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

DHB Wicaksono; F jutzi; G Pandraud; PJ French

Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

DHB Wicaksono, F jutzi, G Pandraud, PJ French

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application
Editors	s.n.
Place of Publication	delft, the netherlands
Publisher	ISSM
Pages	163-167
Number of pages	5
ISBN (Print)	0855-8692
Publication status	Published - 2008
Event	ISSM 2008 - delft, the netherlands Duration: 13 May 2008 → 15 May 2008

Publication series

Name
Publisher	ISSM

Conference

Conference	ISSM 2008
Period	13/05/08 → 15/05/08

Keywords

Elektrotechniek
Techniek
conference contrib. non-refer.
Conf.proc. > 3 pag

Cite this

@inproceedings{6062bb014c9942e8b177ce3b93ea5a8d,

title = "Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application",

keywords = "Elektrotechniek, Techniek, conference contrib. non-refer., Conf.proc. > 3 pag",

author = "DHB Wicaksono and F jutzi and G Pandraud and PJ French",

year = "2008",

language = "Undefined/Unknown",

isbn = "0855-8692",

publisher = "ISSM",

pages = "163--167",

editor = "s.n.",

booktitle = "Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application",

note = "ISSM 2008 ; Conference date: 13-05-2008 Through 15-05-2008",

}

Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application. / Wicaksono, DHB; jutzi, F; Pandraud, G et al.
Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application. ed. / s.n. delft, the netherlands: ISSM, 2008. p. 163-167.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

AU - Wicaksono, DHB

AU - jutzi, F

AU - Pandraud, G

AU - French, PJ

PY - 2008

Y1 - 2008

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. non-refer.

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0855-8692

SP - 163

EP - 167

BT - Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

A2 - s.n., null

PB - ISSM

CY - delft, the netherlands

T2 - ISSM 2008

Y2 - 13 May 2008 through 15 May 2008

ER -