Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

DHB Wicaksono, F jutzi, G Pandraud, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationOptical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application
Editors s.n.
Place of Publicationdelft, the netherlands
PublisherISSM
Pages163-167
Number of pages5
ISBN (Print)0855-8692
Publication statusPublished - 2008
EventISSM 2008 - delft, the netherlands
Duration: 13 May 200815 May 2008

Publication series

Name
PublisherISSM

Conference

ConferenceISSM 2008
Period13/05/0815/05/08

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. non-refer.
  • Conf.proc. > 3 pag

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