@inproceedings{6062bb014c9942e8b177ce3b93ea5a8d,
title = "Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application",
keywords = "Elektrotechniek, Techniek, conference contrib. non-refer., Conf.proc. > 3 pag",
author = "DHB Wicaksono and F jutzi and G Pandraud and PJ French",
year = "2008",
language = "Undefined/Unknown",
isbn = "0855-8692",
publisher = "ISSM",
pages = "163--167",
editor = "s.n.",
booktitle = "Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application",
note = "ISSM 2008 ; Conference date: 13-05-2008 Through 15-05-2008",
}