Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor

A Purniawan, G Pandraud, PJ French, E Margallo Balbas, PM Sarro

Research output: Contribution to conferenceAbstractScientific

Original languageEnglish
Pages62-62
Number of pages1
Publication statusPublished - 2010
Event10th International Conference on Atomic Layer Deposition, Seoul, Korea - Seoul, Korea
Duration: 20 Jun 201023 Jun 2010

Conference

Conference10th International Conference on Atomic Layer Deposition, Seoul, Korea
Period20/06/1023/06/10

Keywords

  • Geen BTA classificatie

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