Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor

A Purniawan, G Pandraud, PJ French, E Margallo Balbas, PM Sarro

Research output: Contribution to conference › Abstract › Scientific

Original language	English
Pages	62-62
Number of pages	1
Publication status	Published - 2010
Event	10th International Conference on Atomic Layer Deposition, Seoul, Korea - Seoul, Korea Duration: 20 Jun 2010 → 23 Jun 2010

Conference	10th International Conference on Atomic Layer Deposition, Seoul, Korea
Period	20/06/10 → 23/06/10

Keywords

@conference{2259efa1c24d4773bec8c56123223fa8,

title = "Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor",

keywords = "Geen BTA classificatie",

author = "A Purniawan and G Pandraud and PJ French and {Margallo Balbas}, E and PM Sarro",

note = "CD; 10th International Conference on Atomic Layer Deposition, Seoul, Korea ; Conference date: 20-06-2010 Through 23-06-2010",

year = "2010",

language = "English",

pages = "62--62",

}

TY - CONF

T1 - Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor

AU - Purniawan, A

AU - Pandraud, G

AU - French, PJ

AU - Margallo Balbas, E

AU - Sarro, PM

N1 - CD

PY - 2010

Y1 - 2010

KW - Geen BTA classificatie

M3 - Abstract

SP - 62

EP - 62

T2 - 10th International Conference on Atomic Layer Deposition, Seoul, Korea

Y2 - 20 June 2010 through 23 June 2010

ER -