Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications

DHB Wicaksono, F jutzi, G Pandraud, NF de Rooij, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008)
Editors	s.n.
Place of Publication	s.l.
Publisher	apcot
Pages	397-400
Number of pages	4
Publication status	Published - 2008
Event	4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan - s.l. Duration: 22 Jun 2008 → 25 Jun 2008

Name
Publisher	APCOT

Conference	4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan
Period	22/06/08 → 25/06/08

Keywords

@inproceedings{cd87ca03083c466f8504ddb1b109a347,

title = "Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications",

keywords = "conference contrib. non-refer., Conf.proc. > 3 pag",

author = "DHB Wicaksono and F jutzi and G Pandraud and {de Rooij}, NF and PJ French",

year = "2008",

language = "Undefined/Unknown",

publisher = "apcot",

pages = "397--400",

editor = "s.n.",

booktitle = "Proceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008)",

note = "4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan ; Conference date: 22-06-2008 Through 25-06-2008",

}

Wicaksono, DHB, jutzi, F, Pandraud, G, de Rooij, NF & French, PJ 2008, Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications. in s.n. (ed.), Proceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008). apcot, s.l., pp. 397-400, 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan, 22/06/08.

Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications. / Wicaksono, DHB; jutzi, F; Pandraud, G et al.
Proceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008). ed. / s.n. s.l.: apcot, 2008. p. 397-400.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications

AU - Wicaksono, DHB

AU - jutzi, F

AU - Pandraud, G

AU - de Rooij, NF

AU - French, PJ

PY - 2008

Y1 - 2008

KW - conference contrib. non-refer.

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 397

EP - 400

BT - Proceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008)

A2 - s.n., null

PB - apcot

CY - s.l.

T2 - 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan

Y2 - 22 June 2008 through 25 June 2008

ER -