Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors

M Ghaderi, NP Ayerden, G de Graaf, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
EditorsR Brama, JL Sánchez-Rojas
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages95171M-1-95171M-6
DOIs
Publication statusPublished - 2015
EventSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain - Bellingham, WA, USA
Duration: 4 May 20154 May 2015

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume9517
ISSN (Print)0277-786X

Conference

ConferenceSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain
Period4/05/154/05/15

Cite this

Ghaderi, M., Ayerden, NP., de Graaf, G., & Wolffenbuttel, RF. (2015). Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors. In R. Brama, & JL. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems (pp. 95171M-1-95171M-6). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9517). SPIE. https://doi.org/10.1117/12.2178609