Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors

M Ghaderi; NP Ayerden; G de Graaf; RF Wolffenbuttel

doi:10.1117/12.2178609

Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors

M Ghaderi, NP Ayerden, G de Graaf, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Original language	English
Title of host publication	Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Editors	R Brama, JL Sánchez-Rojas
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	95171M-1-95171M-6
DOIs	https://doi.org/10.1117/12.2178609
Publication status	Published - 2015
Event	Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain - Bellingham, WA, USA Duration: 4 May 2015 → 4 May 2015

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	9517
ISSN (Print)	0277-786X

Conference

Conference	Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain
Period	4/05/15 → 4/05/15

Bibliographical note

Harvest

Access to Document

10.1117/12.2178609

Cite this

Ghaderi, M., Ayerden, NP., de Graaf, G., & Wolffenbuttel, RF. (2015). Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors. In R. Brama, & JL. Sánchez-Rojas (Eds.), Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems (pp. 95171M-1-95171M-6). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9517). SPIE. https://doi.org/10.1117/12.2178609

Ghaderi, M ; Ayerden, NP ; de Graaf, G et al. / Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors. Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. editor / R Brama ; JL Sánchez-Rojas. Bellingham, WA, USA : SPIE, 2015. pp. 95171M-1-95171M-6 (Proceedings of SPIE- International Society for Optical Engineering).

@inproceedings{b2a0e5acc60c4c9f957f7653ea53e86f,

title = "Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors",

author = "M Ghaderi and NP Ayerden and {de Graaf}, G and RF Wolffenbuttel",

note = "Harvest; Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain ; Conference date: 04-05-2015 Through 04-05-2015",

year = "2015",

doi = "10.1117/12.2178609",

language = "English",

publisher = "SPIE",

pages = "95171M--1--95171M--6",

editor = "R Brama and JL S{\'a}nchez-Rojas",

booktitle = "Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems",

address = "United States",

}

Ghaderi, M, Ayerden, NP, de Graaf, G & Wolffenbuttel, RF 2015, Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors. in R Brama & JL Sánchez-Rojas (eds), Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. Proceedings of SPIE- International Society for Optical Engineering, vol. 9517, SPIE, Bellingham, WA, USA, pp. 95171M-1-95171M-6, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain, 4/05/15. https://doi.org/10.1117/12.2178609

Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors. / Ghaderi, M; Ayerden, NP; de Graaf, G et al.
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. ed. / R Brama; JL Sánchez-Rojas. Bellingham, WA, USA: SPIE, 2015. p. 95171M-1-95171M-6 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9517).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors

AU - Ghaderi, M

AU - Ayerden, NP

AU - de Graaf, G

AU - Wolffenbuttel, RF

N1 - Harvest

PY - 2015

Y1 - 2015

U2 - 10.1117/12.2178609

DO - 10.1117/12.2178609

M3 - Conference contribution

SP - 95171M-1-95171M-6

BT - Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems

A2 - Brama, R

A2 - Sánchez-Rojas, JL

PB - SPIE

CY - Bellingham, WA, USA

T2 - Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain

Y2 - 4 May 2015 through 4 May 2015

ER -

Ghaderi M, Ayerden NP, de Graaf G , Wolffenbuttel RF. Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors. In Brama R, Sánchez-Rojas JL, editors, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. Bellingham, WA, USA: SPIE. 2015. p. 95171M-1-95171M-6. (Proceedings of SPIE- International Society for Optical Engineering). doi: 10.1117/12.2178609