Optical correction plate, and its application in a lithographic projection apparatus

JJM Braat (Inventor), CJ van der Laan (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberUS6542219, verleend
Priority date1/04/03
Publication statusPublished - 2003

Keywords

  • Peer-lijst tijdschrift

Cite this

Braat, JJM., & van der Laan, CJ. (2003). Optical correction plate, and its application in a lithographic projection apparatus. (Patent No. US6542219, verleend).