Optical design and characterization of a gas filled MEMS Fabry-Perot filter

NP Ayerden; M Ghaderi; G de Graaf; RF Wolffenbuttel

doi:10.1117/12.2178773

Optical design and characterization of a gas filled MEMS Fabry-Perot filter

NP Ayerden, M Ghaderi, G de Graaf, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of Smart Sensors, Actuators, and MEMS VII
Editors	JL Sanchez-Rojas, R Brama
Place of Publication	Bellingham
Publisher	SPIE
Pages	1-8
Number of pages	8
DOIs	https://doi.org/10.1117/12.2178773
Publication status	Published - 2015
Event	Smart Sensors, Actuators, and MEMS VII, Barcelona, Spain - Bellingham Duration: 4 May 2015 → 8 May 2015

Publication series

Name
Publisher	Spie

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	SPIE 9517
ISSN (Print)	0277-786X

Conference

Conference	Smart Sensors, Actuators, and MEMS VII, Barcelona, Spain
Period	4/05/15 → 8/05/15

Bibliographical note

harvest

Access to Document

10.1117/12.2178773

Cite this

Ayerden, NP., Ghaderi, M., de Graaf, G., & Wolffenbuttel, RF. (2015). Optical design and characterization of a gas filled MEMS Fabry-Perot filter. In JL. Sanchez-Rojas, & R. Brama (Eds.), Proceedings of Smart Sensors, Actuators, and MEMS VII (pp. 1-8). (Proceedings of SPIE- International Society for Optical Engineering; Vol. SPIE 9517). SPIE. https://doi.org/10.1117/12.2178773

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title = "Optical design and characterization of a gas filled MEMS Fabry-Perot filter",

author = "NP Ayerden and M Ghaderi and {de Graaf}, G and RF Wolffenbuttel",

note = "harvest; Smart Sensors, Actuators, and MEMS VII, Barcelona, Spain ; Conference date: 04-05-2015 Through 08-05-2015",

year = "2015",

doi = "10.1117/12.2178773",

language = "English",

publisher = "SPIE",

pages = "1--8",

editor = "JL Sanchez-Rojas and R Brama",

booktitle = "Proceedings of Smart Sensors, Actuators, and MEMS VII",

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Ayerden, NP, Ghaderi, M, de Graaf, G & Wolffenbuttel, RF 2015, Optical design and characterization of a gas filled MEMS Fabry-Perot filter. in JL Sanchez-Rojas & R Brama (eds), Proceedings of Smart Sensors, Actuators, and MEMS VII. Proceedings of SPIE- International Society for Optical Engineering, vol. SPIE 9517, SPIE, Bellingham, pp. 1-8, Smart Sensors, Actuators, and MEMS VII, Barcelona, Spain, 4/05/15. https://doi.org/10.1117/12.2178773

Optical design and characterization of a gas filled MEMS Fabry-Perot filter. / Ayerden, NP; Ghaderi, M; de Graaf, G et al.
Proceedings of Smart Sensors, Actuators, and MEMS VII. ed. / JL Sanchez-Rojas; R Brama. Bellingham: SPIE, 2015. p. 1-8 (Proceedings of SPIE- International Society for Optical Engineering; Vol. SPIE 9517).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Optical design and characterization of a gas filled MEMS Fabry-Perot filter

AU - Ayerden, NP

AU - Ghaderi, M

AU - de Graaf, G

AU - Wolffenbuttel, RF

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PY - 2015

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DO - 10.1117/12.2178773

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BT - Proceedings of Smart Sensors, Actuators, and MEMS VII

A2 - Sanchez-Rojas, JL

A2 - Brama, R

PB - SPIE

CY - Bellingham

T2 - Smart Sensors, Actuators, and MEMS VII, Barcelona, Spain

Y2 - 4 May 2015 through 8 May 2015

ER -