Original language | English |
---|---|
IPC | G01M, G03F |
Priority date | 14/08/18 |
Publication status | Published - 2020 |
Bibliographical note
Patent: OCT-18-033Applicant: TU Delft
Yifeng Shao (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | G01M, G03F |
Priority date | 14/08/18 |
Publication status | Published - 2020 |