Optical metrology techniques for dimensional stability measurements.

JD Ellis

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Munnig Schmidt, Robert, Supervisor Spronck, J.W., Advisor Leach, R., Advisor, External person
Award date	3 Dec 2010
Place of Publication	Delft
Publisher	J.D. Ellis, printed by Wöhrmann Print Services
Print ISBNs	978-94-91104-06-0
Publication status	Published - 2010

Keywords

@phdthesis{2a0df13aef13428b8b74e3e63587a99e,

title = "Optical metrology techniques for dimensional stability measurements.",

keywords = "Diss. prom. aan TU Delft",

author = "JD Ellis",

year = "2010",

language = "English",

isbn = "978-94-91104-06-0",

publisher = "J.D. Ellis, printed by W{\"o}hrmann Print Services",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}