Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane

W. J. Westerveld, S. M. Leinders, P. L.M.J. Van Neer, H. P. Urbach, N. De Jong, M. D. Verweij, X. Rottenberg, V. Rochus

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

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