Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range

L Shi; F Sarubbi; LK Nanver; U Krothc A; A Gottwald; S Nihtianov

doi:10.1016/j.proeng.2010.09.189

Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range

L Shi, F Sarubbi, LK Nanver, U Krothc A, A Gottwald, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

31 Citations (Scopus)

Original language	English
Title of host publication	Proceedings EuroSensors XXIV
Editors	B Jakoby, MJ Vellekoop
Place of Publication	Amsterdam, The Netherlands
Publisher	Elsevier
Pages	633-636
Number of pages	4
DOIs	https://doi.org/10.1016/j.proeng.2010.09.189
Publication status	Published - 2010
Event	Eurosensors XXIV - Linz, Austria Duration: 5 Sept 2010 → 8 Sept 2010

Publication series

Name
Publisher	Elsevier

Name	Procedia Engineering
Volume	5
ISSN (Print)	1877-7058

Conference

Conference	Eurosensors XXIV
Country/Territory	Austria
City	Linz
Period	5/09/10 → 8/09/10

Access to Document

10.1016/j.proeng.2010.09.189

Cite this

@inproceedings{3cc935dd0dd1473fa1b10a7ee3c941e8,

title = "Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range",

author = "L Shi and F Sarubbi and LK Nanver and {Krothc A}, U and A Gottwald and S Nihtianov",

year = "2010",

doi = "10.1016/j.proeng.2010.09.189",

language = "English",

publisher = "Elsevier",

pages = "633--636",

editor = "B Jakoby and MJ Vellekoop",

booktitle = "Proceedings EuroSensors XXIV",

note = "Eurosensors XXIV ; Conference date: 05-09-2010 Through 08-09-2010",

}

Shi, L, Sarubbi, F, Nanver, LK, Krothc A, U, Gottwald, A & Nihtianov, S 2010, Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range. in B Jakoby & MJ Vellekoop (eds), Proceedings EuroSensors XXIV. Procedia Engineering, vol. 5, Elsevier, Amsterdam, The Netherlands, pp. 633-636, Eurosensors XXIV, Linz, Austria, 5/09/10. https://doi.org/10.1016/j.proeng.2010.09.189

Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range. / Shi, L; Sarubbi, F; Nanver, LK et al.
Proceedings EuroSensors XXIV. ed. / B Jakoby; MJ Vellekoop. Amsterdam, The Netherlands: Elsevier, 2010. p. 633-636 (Procedia Engineering; Vol. 5).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range

AU - Shi, L

AU - Sarubbi, F

AU - Nanver, LK

AU - Krothc A, U

AU - Gottwald, A

AU - Nihtianov, S

PY - 2010

Y1 - 2010

U2 - 10.1016/j.proeng.2010.09.189

DO - 10.1016/j.proeng.2010.09.189

M3 - Conference contribution

SP - 633

EP - 636

BT - Proceedings EuroSensors XXIV

A2 - Jakoby, B

A2 - Vellekoop, MJ

PB - Elsevier

CY - Amsterdam, The Netherlands

T2 - Eurosensors XXIV

Y2 - 5 September 2010 through 8 September 2010

ER -