Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

JPAM Driessen, AD Kuypers, J Schoonman

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
Editors	A Figueras
Publisher	EDP Sciences
Pages	605-612
Number of pages	8
Publication status	Published - 1999

Name
Publisher	EDP Sciences France

Name	The European Physical Journal. Special Topics
Volume	9
ISSN (Print)	1155-4339

ISSN: 1155-4339

Cite this

@inproceedings{8c2597d125f74cfda7d5d3781d9ee28f,

title = "Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis",

author = "JPAM Driessen and AD Kuypers and J Schoonman",

note = "ISSN: 1155-4339",

year = "1999",

language = "Undefined/Unknown",

publisher = "EDP Sciences",

pages = "605--612",

editor = "A Figueras",

booktitle = "Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)",

address = "France",

}

Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis. / Driessen, JPAM; Kuypers, AD; Schoonman, J.
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12). ed. / A Figueras. EDP Sciences, 1999. p. 605-612 (The European Physical Journal. Special Topics; Vol. 9).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

AU - Driessen, JPAM

AU - Kuypers, AD

AU - Schoonman, J

N1 - ISSN: 1155-4339

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 605

EP - 612

BT - Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)

A2 - Figueras, A

PB - EDP Sciences

ER -