Optimization in the Photolithography Bay: Scheduling and the Traveling Salesman Problem

INIS

• optimization 100%
• layers 100%
• bays 100%
• equipment 66%
• semiconductor materials 66%
• images 66%
• production 33%
• chemical reactions 33%
• levels 33%
• geometry 33%
• processing 33%
• metals 33%
• linear programming 33%
• construction 33%
• silicon 33%
• integrated circuits 33%
• deposition 33%
• slabs 33%

Material Science

• Optical Lithography 100%
• Semiconductor Material 40%
• Electronic Circuit 40%
• Silicon 20%
• Lithography 20%
• Metal Deposition 20%