Optimization of capacitive membrane sensors for surface-stress-based measurements

Banafsheh Sajadi, Hans Goosen, Fred van Keulen

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
145 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Optimization of capacitive membrane sensors for surface-stress-based measurements'. Together they form a unique fingerprint.

INIS

Engineering