Optimization of focused ion beam performance

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2654-2659
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume27
    Issue number6
    Publication statusPublished - 2009

    Keywords

    • CWTS JFIS < 0.75

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