Optimization of focused ion beam performance

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2654-2659
Number of pages	6
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	27
Issue number	6
Publication status	Published - 2009

Keywords

@article{65d3ed81272545cbbe5f61a3340531bf,

title = "Optimization of focused ion beam performance",

keywords = "CWTS JFIS < 0.75",

author = "CW Hagen and P Kruit",

year = "2009",

language = "Undefined/Unknown",

volume = "27",

pages = "2654--2659",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Optimization of focused ion beam performance

AU - Hagen, CW

AU - Kruit, P

PY - 2009

Y1 - 2009

KW - CWTS JFIS < 0.75

M3 - Article

SN - 1071-1023

VL - 27

SP - 2654

EP - 2659

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -