Optimization of focused ion beam performance

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2654-2659
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume27
Issue number6
Publication statusPublished - 2009

Keywords

  • CWTS JFIS < 0.75

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