Optimization of mulitlayer reflectors for extreme ultraviolet lithography

MF Bal, M Singh, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)1637-1646
Number of pages10
JournalJournal of Microlithography, Microfabrication, and Microsystems
Volume3
Publication statusPublished - 2004

Keywords

  • Peer-lijst tijdschrift

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