Optimization of mulitlayer reflectors for extreme ultraviolet lithography

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1637-1646
Number of pages	10
Journal	Journal of Microlithography, Microfabrication, and Microsystems
Volume	3
Publication status	Published - 2004

Keywords

@article{26390c76afd84300855dd7d797728171,

title = "Optimization of mulitlayer reflectors for extreme ultraviolet lithography",

keywords = "Peer-lijst tijdschrift",

author = "MF Bal and M Singh and JJM Braat",

year = "2004",

language = "Undefined/Unknown",

volume = "3",

pages = "1637--1646",

journal = "Journal of Microlithography, Microfabrication, and Microsystems",

issn = "1537-1646",

publisher = "SPIE",

}

TY - JOUR

T1 - Optimization of mulitlayer reflectors for extreme ultraviolet lithography

AU - Bal, MF

AU - Singh, M

AU - Braat, JJM

PY - 2004

Y1 - 2004

KW - Peer-lijst tijdschrift

M3 - Article

SN - 1537-1646

VL - 3

SP - 1637

EP - 1646

JO - Journal of Microlithography, Microfabrication, and Microsystems

JF - Journal of Microlithography, Microfabrication, and Microsystems

ER -