Optimization of Polymeric Electro-Thermal Micro-Actuator for Various Criteria

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


This paper explores the possibility of advancing the actuation capability of a thermal actuator design, based on the polymeric SU-8 epoxy with embedded silicon (Si) microstructures. Theoretical models for the actuator design are established in an attempt to evaluate the thermoelastic and thermal time responses for the composite design. Thereafter, design criteria and design variables are identified. Optimization of the composite design results in an optimum design that improves the energy density, but does not compromise the thermal response time. The optimum design (70-30% SU-8/Si) has a 20% higher energy density than that of the initial design (50-50% SU-8/Si) and a 20% decrease in thermal response time. It is noted that the optimum energy density for the composite is 2.6 times higher than pure SU-8. Keywords: MEMS actuator, thermal actuator, artificial muscle, micro-actuator, polymeric actuator.
Original languageUndefined/Unknown
Title of host publicationProceedings of the 7th World Congress of Structural and Multidisciplinary Optimization
Editors Byung Man Kwak
Place of PublicationSeoul, Korea
Number of pages10
ISBN (Print)978-89-959384-2-3
Publication statusPublished - 2007
Event7th World Congress on Structural and Multidisciplinary Optimization - Seoul
Duration: 21 May 200725 May 2007

Publication series



Conference7th World Congress on Structural and Multidisciplinary Optimization


  • conference contrib. refereed
  • Conf.proc. > 3 pag

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