Optimizing chemical mechanical polishing process in 3D-IC

J Derakhshandeh Kheljani, MR Tajari Mofrad, R Ishihara, CIM Beenakker, J van der Cingel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationThe annual workshop on semiconductor advances for future electronics and sensors
Editors s.n.
Place of PublicationVeldhoven, the Netherlands
PublisherSTW
Pages461-464
Number of pages4
ISBN (Print)978-90-73461-56-7
Publication statusPublished - 2008
EventSAFE 2008, Veldhoven, the Netherlands - Veldhoven, the Nederlands
Duration: 27 Nov 200828 Nov 2008

Publication series

Name
PublisherSTW

Conference

ConferenceSAFE 2008, Veldhoven, the Netherlands
Period27/11/0828/11/08

Keywords

  • conference contrib. non-refer.
  • Vakpubl., Overig wet. > 3 pag

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