Optimizing multilayer coatings for extreme UV projection systems

MF Bal, M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publication3rd International Conference on Optics-photonics Design & Fabrication, The optical Society of Japan, Tokyo, 2002
Editors Ichioka, Y.
Number of pages2
Publication statusPublished - 2002


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