Optimizing multilayer coatings for extreme UV projection systems

MF Bal, M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	3rd International Conference on Optics-photonics Design & Fabrication, The optical Society of Japan, Tokyo, 2002
Editors	Ichioka, Y.
Pages	169-170
Number of pages	2
Publication status	Published - 2002

Keywords

@inproceedings{f406ca0097084cd8960caf9abd704077,

title = "Optimizing multilayer coatings for extreme UV projection systems",

keywords = "Geen BTA classificatie",

author = "MF Bal and M Singh and JJM Braat",

year = "2002",

language = "Undefined/Unknown",

pages = "169--170",

editor = "{Ichioka, Y.}",

booktitle = "3rd International Conference on Optics-photonics Design & Fabrication, The optical Society of Japan, Tokyo, 2002",

}

Optimizing multilayer coatings for extreme UV projection systems. / Bal, MF; Singh, M; Braat, JJM.
3rd International Conference on Optics-photonics Design & Fabrication, The optical Society of Japan, Tokyo, 2002. ed. / Ichioka, Y. 2002. p. 169-170.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review