Optimizing the Directivity of Piezoelectric Matrix Transducer Elements Mounted on an ASIC

Maysam Shabanimotlagh, Verya Daeichin, Shreyas B. Raghunathan, Pieter Kruizinga, Hendrik J. Vos, Johannes G. Bosch, Michiel Pertijs, Nico De Jong, Martin Verweij

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)


Over the last decade, clinical studies show a strong interest in real-time 3D imaging. This calls for ultrasound probes with high-element-count 2D matrix transducer arrays. These may be interfaced to an imaging system using an in-probe Application Specific Integrated Circuit (ASIC) that takes care of signal amplification, element switching, sub-array beamforming, etc. Since the ASIC is made from silicon and is mounted directly behind the transducer elements, it can acoustically be regarded as a rigid plate that can sustain traveling lateral waves. These waves lead to acoustical cross-talk between the elements, and results in extra peaks in the directivity pattern. We propose two solutions to this problem, based on numerical simulations. One approach is to decrease the phase velocity in the silicon by reducing the silicon thickness and absorbing the energy using a proper backing material. Another solution is to disturb the waves inside the silicon plate by sub-dicing the back-side of the ASIC. We conclude that both solutions can be used to improve the directivity pattern.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium (IUS)
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5386-3383-0
Publication statusPublished - 2017
Event2017 IEEE International Ultrasonics Symposium - Washington, DC, United States
Duration: 6 Sep 20179 Sep 2017


Conference2017 IEEE International Ultrasonics Symposium
Abbreviated titleIUS 2017
CountryUnited States
CityWashington, DC
Internet address


  • Acoustic crosstalk
  • Directivity pattern
  • Matrix transducer
  • PZT on ASIC


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