Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

W.J. Westerveld; Md. Mahmud-Ul-Hasan; Cedric Pieters; Jon Kjellman; Rami Shnaiderman; Vasilis Ntziachristos; Roelof Jansen; Simone Severi; Veronique Rochus; Xavier Rottenberg

Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

W.J. Westerveld^*
, Md. Mahmud-Ul-Hasan
, Cedric Pieters
, Jon Kjellman
, Rami Shnaiderman
, Vasilis Ntziachristos
, Roelof Jansen
, Simone Severi
, Veronique Rochus
, Xavier Rottenberg

^*Corresponding author for this work

Dynamics of Micro and Nano Systems

Research output: Contribution to conference › Abstract › Scientific

Abstract

We present sensitive ultrasound sensors with an innovative silicon photonic optomechanical waveguide that features a 15-nm gap between movable parts [Nature Photonics 15, 341 (2021)]. Sensors are fabricated using CMOS-compatible processing and tested for biomedical imaging.

Original language	English
Publication status	Published - 2022
Event	CLEO: Applications and Technology, A and T 2022 - San Jose, United States Duration: 15 May 2022 → 20 May 2022

Conference

Conference	CLEO: Applications and Technology, A and T 2022
Country/Territory	United States
City	San Jose
Period	15/05/22 → 20/05/22

Cite this

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title = "Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)",

abstract = "We present sensitive ultrasound sensors with an innovative silicon photonic optomechanical waveguide that features a 15-nm gap between movable parts [Nature Photonics 15, 341 (2021)]. Sensors are fabricated using CMOS-compatible processing and tested for biomedical imaging. ",

author = "W.J. Westerveld and Md. Mahmud-Ul-Hasan and Cedric Pieters and Jon Kjellman and Rami Shnaiderman and Vasilis Ntziachristos and Roelof Jansen and Simone Severi and Veronique Rochus and Xavier Rottenberg",

year = "2022",

language = "English",

note = "CLEO: Applications and Technology, A and T 2022 ; Conference date: 15-05-2022 Through 20-05-2022",

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TY - CONF

T1 - Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

AU - Westerveld, W.J.

AU - Mahmud-Ul-Hasan, Md.

AU - Pieters, Cedric

AU - Kjellman, Jon

AU - Shnaiderman, Rami

AU - Ntziachristos, Vasilis

AU - Jansen, Roelof

AU - Severi, Simone

AU - Rochus, Veronique

AU - Rottenberg, Xavier

PY - 2022

Y1 - 2022

N2 - We present sensitive ultrasound sensors with an innovative silicon photonic optomechanical waveguide that features a 15-nm gap between movable parts [Nature Photonics 15, 341 (2021)]. Sensors are fabricated using CMOS-compatible processing and tested for biomedical imaging.

AB - We present sensitive ultrasound sensors with an innovative silicon photonic optomechanical waveguide that features a 15-nm gap between movable parts [Nature Photonics 15, 341 (2021)]. Sensors are fabricated using CMOS-compatible processing and tested for biomedical imaging.

M3 - Abstract

T2 - CLEO: Applications and Technology, A and T 2022

Y2 - 15 May 2022 through 20 May 2022

ER -

Opto-Mechanical Ultrasound Sensors in Silicon Photonics (invited)

Abstract

Conference

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