@inproceedings{8584dd71b52742499499e151ea780866,
title = "Optomechanical characterization of annealed thin PECVD oxide membranes",
author = "M Ghaderi and {de Graaf}, G and RF Wolffenbuttel",
year = "2016",
language = "English",
publisher = "Elsevier",
pages = "1--4",
editor = "RJ Wiegerink and D Tsoukalas and U Staufer",
booktitle = "Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques",
note = "MNE 2015, The Hague, The Netherlands ; Conference date: 21-09-2015 Through 24-09-2015",
}