Optomechanical characterization of annealed thin PECVD oxide membranes

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques
EditorsRJ Wiegerink, D Tsoukalas, U Staufer
Place of PublicationAmsterdam
PublisherElsevier
Pages1-4
Number of pages4
Publication statusPublished - 2016
EventMNE 2015, The Hague, The Netherlands - Amsterdam
Duration: 21 Sep 201524 Sep 2015

Publication series

Name
PublisherElsevier

Conference

ConferenceMNE 2015, The Hague, The Netherlands
Period21/09/1524/09/15

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