Optomechanical ultrasound sensors in silicon photonics (invited)

Wouter J. Westerveld, Md. Mahmud-Ul-Hasan, Cedric Pieters, Roelof Jansen, Simone Severi, Veronique Rochus, Xavier Rottenberg

Research output: Contribution to conferenceAbstractScientific


Future applications of ultrasound and photoacoustic imaging require a matrix of small and sensitive ultrasound sensors with read-out through a flexible cable. Silicon photonic ultrasound sensors have good prospects: small and sensitive sensors, wafer-scale fabrication, and matrix read-out via single optical fiber using photonic multiplexing. Here, we discuss different types of silicon photonic ultrasound sensors and their applications. This includes our optomechanical ultrasound sensor with extreme sensitivity that is achieved with an innovative optomechanical silicon photonic waveguide in an acoustical membrane. We discuss limitations of state-of-the-art piezoelectric sensors, how silicon photonic sensors overcome these, and applications in medical imaging.
Original languageEnglish
Publication statusPublished - 2021
Externally publishedYes
EventSPIE Conference 11691 (Photonics West, OPTO, Silicon Photonics XVI) - Online Only, United States
Duration: 6 Mar 202111 Mar 2021


ConferenceSPIE Conference 11691 (Photonics West, OPTO, Silicon Photonics XVI)
Country/TerritoryUnited States


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