Orthodox etching of HVPE-grown GaN

JL Weyher, S Lazar, L Macht, Z Liliental-Weber, Rj Molnar, S Muller, VGM Sivel, G Nowak, I Grzegory

    Research output: Contribution to journalArticleScientific

    106 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)384-392
    Number of pages9
    JournalJournal of Crystal Growth
    Issue number2
    Publication statusPublished - 2007


    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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