Orthodox etching of HVPE-grown GaN

JL Weyher, S Lazar, L Macht, Z Liliental-Weber, Rj Molnar, S Muller, VGM Sivel, G Nowak, I Grzegory

Research output: Contribution to journal › Article › Scientific

Keywords

@article{85da5c6128b04b098294cf116527af8c,

title = "Orthodox etching of HVPE-grown GaN",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "JL Weyher and S Lazar and L Macht and Z Liliental-Weber and Rj Molnar and S Muller and VGM Sivel and G Nowak and I Grzegory",

year = "2007",

language = "Undefined/Unknown",

volume = "305",

pages = "384--392",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Orthodox etching of HVPE-grown GaN

AU - Weyher, JL

AU - Lazar, S

AU - Macht, L

AU - Liliental-Weber, Z

AU - Molnar, Rj

AU - Muller, S

AU - Sivel, VGM

AU - Nowak, G

AU - Grzegory, I

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0022-0248

VL - 305

SP - 384

EP - 392

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 2

ER -