Fingerprint
Dive into the research topics of 'Oxygen-based digital etching of AlGaN/GaN structures with AlN as etch-stop layers'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Oxygen-based digital etching of AlGaN/GaN structures with AlN as etch-stop layers
Jingyi Wu, Siqi Lei, Wei-Chih Cheng, Robert Sokolovskij, Qing Wang, Guangrui Maggie Xia, Hongyu Yu
Research output: Contribution to journal › Article › Scientific › peer-review
15
Citations
(Scopus)