Oxygen implanted silicon investigated by positron annihilation spectroscopy

AC Kruseman, H Schut, A van Veen, M Fujinami

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)294-299
    Number of pages6
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume148
    Publication statusPublished - 1999

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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