Oxygen implanted silicon investigated by positron annihilation spectroscopy

AC Kruseman, H Schut, A van Veen, M Fujinami

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	294-299
Number of pages	6
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	148
Publication status	Published - 1999

Keywords

@article{7e8d7d4b5a13488a9fd2c7ea35cab0a9,

title = "Oxygen implanted silicon investigated by positron annihilation spectroscopy",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "AC Kruseman and H Schut and {van Veen}, A and M Fujinami",

year = "1999",

language = "Undefined/Unknown",

volume = "148",

pages = "294--299",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Oxygen implanted silicon investigated by positron annihilation spectroscopy

AU - Kruseman, AC

AU - Schut, H

AU - van Veen, A

AU - Fujinami, M

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0168-583X

VL - 148

SP - 294

EP - 299

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -