Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments

A Rivera, JMM de Nijs, P Balk, A van Veen, H Schut, PFA Alkemade

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)77-81
    Number of pages5
    JournalMaterials Science and Engineering B: Advanced Functional Solid-state Materials
    Issue number(1-3)
    Publication statusPublished - 2000


    • ZX Int.klas.verslagjaar < 2002

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