Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments

A Rivera, JMM de Nijs, P Balk, A van Veen, H Schut, PFA Alkemade

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	77-81
Number of pages	5
Journal	Materials Science and Engineering B: Advanced Functional Solid-state Materials
Volume	73
Issue number	(1-3)
Publication status	Published - 2000

Keywords

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title = "Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Rivera and {de Nijs}, JMM and P Balk and {van Veen}, A and H Schut and PFA Alkemade",

year = "2000",

language = "Undefined/Unknown",

volume = "73",

pages = "77--81",

journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",

issn = "0921-5107",

publisher = "Elsevier",

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}

TY - JOUR

T1 - Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments

AU - Rivera, A

AU - de Nijs, JMM

AU - Balk, P

AU - van Veen, A

AU - Schut, H

AU - Alkemade, PFA

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

VL - 73

SP - 77

EP - 81

JO - Materials Science and Engineering B: Advanced Functional Solid-state Materials

JF - Materials Science and Engineering B: Advanced Functional Solid-state Materials

SN - 0921-5107

IS - (1-3)

ER -