Packaging influences on the reliability of MEMS resonators

JJM Zaal, WD van Driel, S Bendida, Q Li, JTM van Beek, GQ Zhang

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1567-1571
Number of pages5
JournalMicroelectronics Reliability
Volume48
DOIs
Publication statusPublished - 2008

Keywords

  • CWTS JFIS < 0.75

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