Packaging influences on the reliability of MEMS resonators

JJM Zaal, WD van Driel, S Bendida, Q Li, JTM van Beek, GQ Zhang

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1567-1571
Number of pages	5
Journal	Microelectronics Reliability
Volume	48
DOIs	https://doi.org/doi:10.1016/j.microrel.2008.06.041
Publication status	Published - 2008

Keywords

@article{2ea557f7e6204ab4a74fc50bcc90f7f1,

title = "Packaging influences on the reliability of MEMS resonators",

keywords = "CWTS JFIS < 0.75",

author = "JJM Zaal and {van Driel}, WD and S Bendida and Q Li and {van Beek}, JTM and GQ Zhang",

year = "2008",

doi = "doi:10.1016/j.microrel.2008.06.041",

language = "Undefined/Unknown",

volume = "48",

pages = "1567--1571",

journal = "Microelectronics Reliability",

issn = "0026-2714",

publisher = "Elsevier",

}

TY - JOUR

T1 - Packaging influences on the reliability of MEMS resonators

AU - Zaal, JJM

AU - van Driel, WD

AU - Bendida, S

AU - Li, Q

AU - van Beek, JTM

AU - Zhang, GQ

PY - 2008

Y1 - 2008

KW - CWTS JFIS < 0.75

U2 - doi:10.1016/j.microrel.2008.06.041

DO - doi:10.1016/j.microrel.2008.06.041

M3 - Article

SN - 0026-2714

VL - 48

SP - 1567

EP - 1571

JO - Microelectronics Reliability

JF - Microelectronics Reliability

ER -