Parallel electron-beam-induces deposition using a multi-beam scanning electron microscope

P.C. Post, A Mohammadi-Gheidari, CW Hagen, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	29
Publication status	Published - 2011

Keywords

@article{aa96844c937b4b3a98d40947375fd098,

title = "Parallel electron-beam-induces deposition using a multi-beam scanning electron microscope",

keywords = "CWTS JFIS < 0.75",

author = "P.C. Post and A Mohammadi-Gheidari and CW Hagen and P Kruit",

year = "2011",

language = "Undefined/Unknown",

volume = "29",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Parallel electron-beam-induces deposition using a multi-beam scanning electron microscope

AU - Post, P.C.

AU - Mohammadi-Gheidari, A

AU - Hagen, CW

AU - Kruit, P

PY - 2011

Y1 - 2011

KW - CWTS JFIS < 0.75

M3 - Article

SN - 1071-1023

VL - 29

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

ER -