Parallel transmission electron detector for multi-beam scanning electron microscope

AC Zonnevylle (Inventor), P Kruit (Inventor), Y Ren (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberWO 2015/170969
    IPCOCT-14-003
    Priority date12/11/15
    Publication statusPublished - 2015

    Keywords

    • Geen VSNU-classificatie

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