@inproceedings{45057bb75a5e40a38268e0e8618f360a,
title = "Parameter calibration for dopant post-implant diffusion",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "J Fu and WJ Eysenga and W Crans",
year = "2001",
language = "Undefined/Unknown",
isbn = "90-73461-29-4",
publisher = "STW Technology Foundation",
pages = "52--57",
booktitle = "ProRISC 2001: proceedings CD-ROM",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}